Title :
A Switched Capacitor Interface for a Capacitive Microphone
Author :
Jawed, S.A. ; Gottardi, M. ; Baschirotto, A.
Author_Institution :
Microsystems Div., ITC-IRST, Trento
Abstract :
A switched capacitor (SC) interface for a capacitive MEMS microphone is described in this paper. By properly switching the sensor, parasitic insensitive ac-coupling readout is directly performed without the need of a large bias resistor. The SC readout-circuit offers the advantages of a differential-topology for a single-ended sensor without accurate capacitor matching techniques
Keywords :
capacitive sensors; microphones; readout electronics; switched capacitor networks; ac-coupling readout; capacitive MEMS microphone; differential topology; readout circuit; single-ended sensor; switched capacitor interface; Acoustic sensors; Biomembranes; Capacitive sensors; Capacitors; Circuits; Micromechanical devices; Microphones; Parasitic capacitance; Resistors; Voltage;
Conference_Titel :
Research in Microelectronics and Electronics 2006, Ph. D.
Conference_Location :
Otranto
Print_ISBN :
1-4244-0157-7
DOI :
10.1109/RME.2006.1689976
