• DocumentCode
    2493453
  • Title

    Nanostructured Molybdenum Oxide Gas Sensors

  • Author

    Li, Y.X. ; Yang, Q.B. ; Yu, X.F. ; Trinchi, A. ; Sadek, A.Z. ; Wlodarski, W. ; Kalantar-zadeh, K.

  • Author_Institution
    Chinese Acad. of Sci., Shanghai
  • fYear
    2006
  • fDate
    22-25 Oct. 2006
  • Firstpage
    232
  • Lastpage
    234
  • Abstract
    In this paper, we present a surface acoustic wave (SAW) gas sensor based on nano-structured molybdenum oxide (MoOx) thin film. The film was deposited onto a 36deg YX LiTaO3 SAW transducer, with an operating frequency of approximately 103 MHz, by thermal evaporation. The nanostructured MoOx film consists of connected nanorods with diameters of less than 100 nm. We compared devices with MoOx deposited by RF sputtering and thermal evaporation and found those with evaporated films have response that are an order of magnitude larger.
  • Keywords
    gas sensors; molybdenum compounds; nanostructured materials; sputtered coatings; surface acoustic wave sensors; LiTaO3; MoO3; RF sputtering; frequency 103 MHz; molybdenum oxide; nanostructured gas sensor; surface acoustic wave gas sensor; thermal evaporation; Crystallization; Electrodes; Furnaces; Gas detectors; Gold; Powders; Sensor arrays; Sputtering; Surface acoustic waves; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2006. 5th IEEE Conference on
  • Conference_Location
    Daegu
  • ISSN
    1930-0395
  • Print_ISBN
    1-4244-0375-8
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2007.355764
  • Filename
    4178602
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2493453