Development of Ultra Low Power Consumption Hotplates for Gas Sensing Applications

Author

Elmi, I. ; Zampolli, S. ; Cozzani, E. ; Passini, M. ; Cardinali, G.C. ; Severi, M.

Author_Institution

Inst. for Microelectron. & Microsyst., Bologna

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

243

Lastpage

246

Abstract

This paper deals with the development of state-of-the-art ultra low power (ULP) consumption hotplates to be used as metal oxide gas sensor substrates. Several types of ULP devices, differing in shape and size, have been fabricated with the same front-side bulk silicon micromachining technology. Details on the device design and on the fabrication processes are provided. The ULP hotplates functional behavior was thoroughly investigated. Typical results on measurements of the hotplate temperature versus applied power are reported. A very satisfactory value of 8.9 mW at 400degC can be highlighted. Transient temperature responses and evaluation of the hotplate thermal time constant were also carried out.

Keywords

electric heating; gas sensors; low-power electronics; gas sensing applications; metal oxide gas sensor substrates; ultra low power consumption hotplates; Energy consumption; Fabrication; Gas detectors; Micromachining; Sensor arrays; Shape; Silicon; Sputtering; Substrates; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2006. 5th IEEE Conference on

Conference_Location

Daegu

ISSN

1930-0395

Print_ISBN

1-4244-0375-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.355767

Filename

4178605