Title :
Preventing degradation of GaAs devices by the use of getter
Author :
Mohanty, Rita ; Gilleo, Ken
Author_Institution :
Alpha Microelictronic Packing Mater., Warwick, RI, USA
Abstract :
Hermetically sealed semiconductor devices containing gallium arsenide (GaAs) and RF absorbers, utilizing industry gate metallization structures have been shown to leach out hydrogen in ambient as well as environmental conditioning which poison and shorten the life of the device. This paper describes manufacturing and application of getter for hydrogen, moisture and particulate to solve problem of degradation due to these contaminants. A brief history describing sources of hydrogen and mechanisms for device degradation by hydrogen is also presented in this paper
Keywords :
III-V semiconductors; gallium arsenide; getters; semiconductor device metallisation; semiconductor device packaging; GaAs; RF absorber; environmental conditioning; gallium arsenide; gate metallization; getter; hermetic package; hydrogen leaching; moisture; particulate contamination; semiconductor device degradation; Degradation; Gallium arsenide; Gettering; Hermetic seals; Hydrogen; Manufacturing industries; Metallization; Metals industry; Radio frequency; Semiconductor devices;
Conference_Titel :
GaAs Reliability Workshop, 1999. Proceedings
Conference_Location :
Monterey, CA
Print_ISBN :
0-7908-0100-0
DOI :
10.1109/GAASRW.1999.874168