DocumentCode :
2494584
Title :
Improved Long-Term Aging in Deeply Etched SAW Resonators
Author :
Adams, Charles A. ; Kusters, John A.
fYear :
1978
fDate :
1978
Firstpage :
74
Lastpage :
76
Keywords :
Aging; Aluminum; Cleaning; Etching; Ovens; Plasma applications; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Surface contamination;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
32nd Annual Symposium on Frequency Control. 1978
Type :
conf
DOI :
10.1109/FREQ.1978.200223
Filename :
1537163
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2494584
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