DocumentCode :
2494854
Title :
Conductivity and mechanical properties of a single-helix carbon microcoil prepared by thermal chemical vapor deposition
Author :
Katsuno, T. ; Ozeki, I. ; Yang, S. ; Chen, X. ; Natsuhara, H. ; Motojima, S. ; Yoshimura, K.
Author_Institution :
Gifu Univ., Gifu
fYear :
2006
fDate :
22-25 Oct. 2006
Firstpage :
567
Lastpage :
570
Abstract :
In order to obtain the basic characteristics of a single-helix carbon microcoil (SH-CMC) with the diameter of ~1 mum for use as tactile sensor elements, the mechanical and electrical properties of a SH-CMC prepared by thermal chemical vapor deposition (CVD) were measured, and compared with the properties of a double-helix carbon microcoil (DH-CMC) having a diameter of about 5 mum. A SH-CMC can be extended up to 3 times its original length, and is not as good when compared to the 10 times extension of the DH-CMC. The conductivity of the SH-CMC is larger than that of the DH-CMC, indicating that the structure of the SH-CMC is more graphitized because the Fe catalyst used for the preparation of the SH-CMC is active than the Ni for the DH-CMC. The impedance |Z| and phase angle thetas results of the SH-/DH-CMC were excellent and corresponded with the model using the parallel components of the (Rp+Lp) and Cp as an equivalent circuit.
Keywords :
CVD coatings; carbon; coils; electrical conductivity; equivalent circuits; micromechanical devices; tactile sensors; carbon microcoil mechanical property; single-helix carbon microcoil conductivity; tactile sensor elements; thermal chemical vapor deposition; Carbon; Chemical elements; Chemical vapor deposition; DH-HEMTs; Electric variables measurement; Iron; Mechanical factors; Mechanical variables measurement; Tactile sensors; Thermal conductivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
ISSN :
1930-0395
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2007.355531
Filename :
4178683
Link To Document :
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