DocumentCode

2494971

Title

Simplified Fixtures with Improved Thin Film Deposition Uniformity on Quartz Crystals

Author

Dybwad, G.L.

fYear

1978

fDate

1978

Firstpage

286

Lastpage

289

Keywords

Crystals; Data analysis; Drives; Electrodes; Fixtures; Frequency; Friction; Laboratories; Sputtering; Telephony;

fLanguage

English

Publisher

ieee

Conference_Titel

32nd Annual Symposium on Frequency Control. 1978

Type

conf

DOI

10.1109/FREQ.1978.200250

Filename

1537190