Electrical and Gas Sensing Properties of Cr2O3-TiO2 Thin Films made by Pulsed Laser Deposition

Author

Jaaniso, R. ; Gerst, A. ; Floren, A. ; Avarmaa, T. ; Sammelselg, V. ; Mändar, H.

Author_Institution

Estonian Nanotechnol. Competence Center Univ., Tartu

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

708

Lastpage

711

Abstract

Pulsed laser deposition was applied to chromia-titania solid solutions (CTO) with the aim to study electrical and gas sensing properties on (ultra)thin films of this material. The films with different compositions (5% to 33.3% of Ti from total cationic amount) were characterized by XRD, XRR, AFM, and EPMA. The electrical conductivity of the films was studied in clean air and in the presence of reducing gases (H₂, CO). The gas sensitivity was found to depend strongly on growth and annealing conditions but only slightly from thickness (10-70 nm) or composition of the films prepared under similar conditions.

Keywords

X-ray diffraction; atomic force microscopy; chromium compounds; electrical conductivity; electron probe analysis; pulsed laser deposition; thin films; titanium compounds; AFM; Cr₂O₃-TiO₂; EPMA; XRD; XRR; chromia-titania solid solutions; electrical conductivity; electrical properties; gas sensing properties; pulsed laser deposition; thin films; Conducting materials; Conductive films; Conductivity; Gas lasers; Optical materials; Optical pulses; Pulsed laser deposition; Solid lasers; Sputtering; X-ray scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2006. 5th IEEE Conference on

Conference_Location

Daegu

ISSN

1930-0395

Print_ISBN

1-4244-0375-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.355559

Filename

4178711