A ZnO Nanorod Based 64?? YX LiNbO3 Surface Acoustic Wave CO Sensor

Author

Sadek, A.Z. ; Wlodarski, W. ; Kalantar-Zadeh, K.

Author_Institution

RMIT Univ., Melbourne

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

691

Lastpage

694

Abstract

Zinc oxide (ZnO) nanorod based surface acoustic wave (SAW) gas sensor has been developed. ZnO nanorods were deposited onto a layered ZnO/64deg YX LiNbO₃ substrate using a liquid solution method. Micro-characterization results reveal that the diameter and area density of ZnO nanorods are around 100 nm and 107 cm^-2, respectively. The sensor was exposed to different concentrations of CO in synthetic air. The sensor response at operating temperatures between 200degC and 300degC was examined. The study showed that the sensor responded with highest frequency shift at 265degC. At this temperature, stable base-line and fast response and recovery were observed. The developed sensor is promising for industrial applications.

Keywords

carbon compounds; gas sensors; lithium compounds; niobium compounds; surface acoustic wave sensors; zinc compounds; CO; LiNbO₃; ZnO; gas sensor; liquid solution method; microcharacterization results; surface acoustic wave; surface acoustic wave CO sensor; zinc oxide nanorod; Acoustic sensors; Acoustic waves; Conductive films; Frequency; Gas detectors; Nanostructured materials; Substrates; Surface acoustic waves; Temperature sensors; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2006. 5th IEEE Conference on

Conference_Location

Daegu

ISSN

1930-0395

Print_ISBN

1-4244-0375-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.355566

Filename

4178718