VHDL-AMS Modeling for Simulation of MEMS Array-Based Smart Surface Applied in Microfluid Air-Flow Environment

In this paper, the authors report about recent achievement in distributed MEMS behavioral modeling, allowing both easy development and faster simulation for better integration of arrayed MEMS into systems. Design and simulation are produced by PC-based cost-effective solution using VHDL-AMS. A hierarchical circuit-level design methodology has been followed to model and simulate in microfluidic environment a MEMS array-based smart surface applied in 2-D micromanipulation. First, a VHDL-AMS-based behavioral model has been achieved. Then, a lower abstraction level model based on structural behavioral model level has been developed and validated integrating a pneumatic micractuator component model. Experimental agreements of resulting simulations are successfully provided at both abstraction levels.