• DocumentCode
    2496245
  • Title

    Microfabrication of Single-Wall Carbon Nanotube One-Dimensional Unit

  • Author

    Wu, Ying ; Zhou, Zhaoying ; Yang, Xing ; Yingying Zhang ; Xiao, Mingfei ; Jin Zhang ; Li, Jinming

  • Author_Institution
    Chongqing Univ. of Sci. & Technol., Chongqing
  • fYear
    2006
  • fDate
    22-25 Oct. 2006
  • Firstpage
    896
  • Lastpage
    899
  • Abstract
    A microfabrication method is devised for integration of long single-wall carbon nanotube (SWNT) into one-dimensional unit. This approach involved the synthesis of the aligned SWCNT array and FIB techniques to bridge predefined molybdenum electrodes. As a demonstration, single-wall nanotube device with metallic electrodes was presented. Sample characterization was carried out with SEM pictures and I-V curves, which show that this fabrication strategy finds applications in the development of micro/nano device and system.
  • Keywords
    carbon nanotubes; electrodes; focused ion beam technology; nanotechnology; FIB techniques; focused ion beam methods; metallic electrodes; microfabrication method; molybdenum electrodes; one-dimensional unit; single-wall carbon nanotube; Atomic force microscopy; Carbon nanotubes; Chemical vapor deposition; Electrodes; Ethanol; Fabrication; Instruments; Ion beams; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2006. 5th IEEE Conference on
  • Conference_Location
    Daegu
  • ISSN
    1930-0395
  • Print_ISBN
    1-4244-0375-8
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2007.355612
  • Filename
    4178764