Title :
Proposal of Novel Absolute-Humidity Sensing Method using a Pair of Diode-Thermistors and a Micro-Heater on a Micro-Air-Bridge
Author :
Kimura, Mitsuteru ; Lee, Seung Seoup
Author_Institution :
Tohoku-Gakuin Univ., Tagajo
Abstract :
Novel absolute-humidity sensing method using a pair of diode-thermistors, Th-A and Th-B, and a micro-heater, formed on a micro-air-bridge (MAB), and using the double pulse heating is proposed. Principle of this absolute-humidity sensor is based on the thermal conductivity change in humid air depending on the absolute humidity D. In the first experiment temperature decreases in the various saturated absolute humidity Ds due to the thermal conductivity changes are clearly observed by pulse heating up to above 200degC.
Keywords :
diodes; humidity sensors; microsensors; thermal conductivity; thermistors; absolute-humidity sensing method; diode-thermistors; double pulse heating; micro-air-bridge; micro-heater; thermal conductivity; Diodes; Equations; Humidity measurement; Proposals; Temperature dependence; Temperature distribution; Temperature measurement; Temperature sensors; Thermal conductivity; Thermal sensors;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355780
