Anisotropy of Etching Rate for Quartz in Ammonium Biflouride

Author

Suda, P. ; Zumsteg, A.E. ; Zingg, W.

fYear

1979

fDate

1979

Firstpage

359

Lastpage

363

Keywords

Abrasives; Anisotropic magnetoresistance; Equations; Etching; Frequency; Grain size; Hafnium; Silicon carbide; Temperature dependence; Thermostats;

fLanguage

English

Publisher

ieee

Conference_Titel

33rd Annual Symposium on Frequency Control. 1979

Type

DOI

10.1109/FREQ.1979.200339

Filename

1537279

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