Title :
Anisotropy of Etching Rate for Quartz in Ammonium Biflouride
Author :
Suda, P. ; Zumsteg, A.E. ; Zingg, W.
Keywords :
Abrasives; Anisotropic magnetoresistance; Equations; Etching; Frequency; Grain size; Hafnium; Silicon carbide; Temperature dependence; Thermostats;
Conference_Titel :
33rd Annual Symposium on Frequency Control. 1979
DOI :
10.1109/FREQ.1979.200339
