Title :
Research of control system platform technology for IC equipment
Author :
Liu, Mingzhe ; Xu, Aidong ; Yu, Haibin ; Wang, Hong
Author_Institution :
Shenyang Inst. of Autom., Chinese Acad. of Sci., Shenyang
Abstract :
With the development of road to 300 mm semiconductor wafer manufacturing, IC equipment control system not only implement its task scheduling, material transfer and process control, we must also consider the enterprise information integration, production scheduling and industry standards. This paper analyzes the semiconductor manufacturing process, control requirements, and presents a framework-style, modular IC equipment control system platform model, aimed at the complete system control functions at the same time, making the control of the semiconductor equipment greater flexibility, scalability, enterprise-class interactive capabilities, and in accordance with industry standards.
Keywords :
industrial control; integrated circuit manufacture; production control; IC equipment control system platform model; enterprise information integration; enterprise-class interactive capability; industry standard; production scheduling; semiconductor wafer manufacturing system; task scheduling; Control system synthesis; Control systems; Electrical equipment industry; Industrial control; Integrated circuit modeling; Job shop scheduling; Manufacturing industries; Manufacturing processes; Process control; Roads; SEMI; control system; integrate circuit; semiconductor;
Conference_Titel :
Intelligent Control and Automation, 2008. WCICA 2008. 7th World Congress on
Conference_Location :
Chongqing
Print_ISBN :
978-1-4244-2113-8
Electronic_ISBN :
978-1-4244-2114-5
DOI :
10.1109/WCICA.2008.4594070
