Title :
Impact of Casimir force on nano accelerometers modeling
Author :
Andreucci, Philippe ; Duraffourg, Laurent ; Ollier, Eric ; Nguyen, Valerie ; Delay, Marie Thérèse ; Robert, Philippe
Author_Institution :
CEA, Grenoble
Abstract :
In this article we compute the Casimir force for silicon nanostructures considering conductivity of silicon and material thickness as both most important parameters for NEMS modeling. We quantify the strong impact of this force on the static and dynamic behavior of a nano accelerometer and compare results to classical computations.
Keywords :
Casimir effect; accelerometers; microsensors; nanotechnology; silicon; Casimir force; NEMS modeling; Si; conductivity; dynamic behavior; material thickness; nano accelerometers modeling; silicon nanostructures; static behavior; Accelerometers; Casimir effect; Conducting materials; Conductivity; Nanoelectromechanical systems; Nanostructured materials; Nanostructures; Optical sensors; Silicon; Slabs;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355807
