DocumentCode
2497245
Title
A membrane quadrant probe for R&D applications
Author
Basu, S. ; Gleason, R.
Author_Institution
Cascade Microtech Inc., Beaverton, OR, USA
Volume
3
fYear
1997
fDate
8-13 June 1997
Firstpage
1671
Abstract
Membrane probes are known for their applications to production probing and their ability to integrate RF lines, matching networks and good power supply bypassing for known good die testing on-wafer. Nonetheless, they require die-specific design and are not reconfigurable. In this paper, we discuss a quadrant probe based on membrane technology which offers this alternative with lower loss than membrane probes and better DC bypassing capability than any other quadrant probe.
Keywords
MMIC; S-parameters; impedance matching; integrated circuit measurement; integrated circuit testing; probes; production testing; DC bypassing; R&D applications; RF lines; die-specific design; known good die testing; loss; matching networks; membrane quadrant probe; on-wafer testing; power supply bypassing; production probing; Biomembranes; Capacitors; Coaxial cables; Coaxial components; Coplanar waveguides; Impedance; Microstrip; Probes; Radio frequency; Research and development;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location
Denver, CO, USA
ISSN
0149-645X
Print_ISBN
0-7803-3814-6
Type
conf
DOI
10.1109/MWSYM.1997.596731
Filename
596731
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