Title :
A Pull-in Operation Mode Accelerometer
Author :
Pakula, Lukasz ; French, Patrick
Author_Institution :
Delft Univ. of Technol., Delft
Abstract :
In this paper an accelerometer, which measures the pull-in time to obtain the acceleration is presented. As the pull-in time is a semi digital signal, the output of the device can be measured with a full digital circuit. No analogue readout circuit is required. The sensitivity and nonlinearity are comparable with the differential capacitive sensing devices. The accelerometer has been fabricated by surface micromachining using Al as the mechanical layer and phosphosilicate glass as the sacrificial layer. The initial measurements have been performed.
Keywords :
accelerometers; micromachining; Al; differential capacitive sensing devices; digital circuit; digital signal; mechanical layer; phosphosilicate glass; pull-in operation mode accelerometer; surface micromachining; Acceleration; Accelerometers; Damping; Digital circuits; Electrodes; Equations; Micromachining; Pulse measurements; Time measurement; Voltage;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355824
