A Low-noise CMOS Readout Circuit for Capacitive Micro-sensors

Author

Huang, M.C. ; Huang, Y.R. ; Chou, H.P.

Author_Institution

Nat. Tsing Hua Univ., Hsinchu

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

1135

Lastpage

1138

Abstract

In this paper, we combined chopper stabilization (CHS) and correlated double sampling (CDS) techniques to remove the parasitic capacitance of MEMS sensor and the noise from the readout electronic circuit. The presented readout circuits can be integrated easily with MEMS sensors using a modern CMOS processes for batch production. The present CMOS-MEMS system is fabricated using a 0.35 mum 2P4M CMOS process. Simulation results indicated that the sensing circuits can achieve a low noise floor 0.0012 aF/radicHz and a low power consumption 19.14 mW with a sampling frequency of 4 MHz.

Keywords

CMOS integrated circuits; capacitive sensors; choppers (circuits); circuit stability; microsensors; readout electronics; batch production; capacitive microsensors; chopper stabilization; correlated double sampling techniques; low-noise CMOS readout circuit; power 19.14 mW; size 0.35 micron; CMOS process; Capacitive sensors; Choppers; Circuit simulation; Energy consumption; Micromechanical devices; Parasitic capacitance; Production; Readout electronics; Sampling methods;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2006. 5th IEEE Conference on

Conference_Location

Daegu

ISSN

1930-0395

Print_ISBN

1-4244-0375-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.355826

Filename

4178821