Title :
Formation of high-conducting nanostructures in low-conducting diamond-like carbon films using SPM-lithograph
Author :
Frolov, V.D. ; Konov, V.I. ; Pimenov, S.M. ; Zavedeev, E.V.
Author_Institution :
Natural Sci. Center, Gen. Phys. Inst. GPI, Moscow, Russia
Abstract :
Low-conducting hydrogenated diamond-like carbon (DLC) a-C:H films were examined for the purpose of nanometer-scaled modifications under the action of local electrical field. The capabilities of SPM technique for preparation of conducting nanostructures in the low-conducting a-C:H films have been demonstrated for the first time.
Keywords :
diamond-like carbon; electrical conductivity; hydrogen; nanoelectronics; nanostructured materials; scanning probe microscopy; C:H; SPM technique; SPM-lithograph; a-C:H films; conducting nanostructures; high-conducting nanostructures; hydrogenated DLC films; local electrical field; low-conducting diamond-like carbon films; nanometer-scaled modifications; Chromium; Diamond-like carbon; Electrons; IEEE catalog; Nanostructures; Nanotechnology; Organic materials; Physics; Scanning probe microscopy; Surface topography;
Conference_Titel :
Microwave and Telecommunication Technology, 2004. CriMico 2004. 2004 14th International Crimean Conference on
Print_ISBN :
966-7968-69-3
DOI :
10.1109/CRMICO.2004.183313
