DocumentCode
2498011
Title
A Temperature-Compensated ZnO-on-Diamond Resonant Mass Sensor
Author
Abdolvand, Reza ; Hao, Zhili ; Ayazi, Farrokh
Author_Institution
Georgia Inst. of Technol., Atlanta
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
1297
Lastpage
1300
Abstract
This paper reports on the fabrication and measurement of ZnO-on-diamond length-extensional resonant mass sensors. Improved mass sensitivity due to the higher frequency of operation as well as lower motional impedance compared to capacitively-transduced sensors of the same type is demonstrated. Measured mass sensitivity of ~1 kHz/pg is shown at ~39 MHz operation frequency. Moreover, a small temperature coefficient of frequency (TCF) of -6 ppm/degC is achieved by incorporating a layer of silicon dioxide in the resonator structure.
Keywords
mass measurement; resonators; temperature sensors; zinc compounds; ZnO; mass sensitivity; motional impedance; resonator structure; silicon dioxide layer; temperature coefficient of frequency; temperature-compensated on-diamond resonant mass sensor; Acoustic sensors; Biosensors; Chemical and biological sensors; Electrodes; Frequency; Impedance; Resonance; Sensor arrays; Temperature sensors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2006. 5th IEEE Conference on
Conference_Location
Daegu
ISSN
1930-0395
Print_ISBN
1-4244-0375-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.355867
Filename
4178862
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