Performance Trade-offs of an Interferometric Micro-g Resolution Accelerometer

Author

Perez, Maximillian ; Shkel, Andrei M.

Author_Institution

California Univ., Irvine

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

1357

Lastpage

1360

Abstract

A high resolution bulk micromachined accelerometer based on transmission-type intrinsic Fabry-Perot interferometer has been experimentally evaluated via direct inertial characterization for the first time. The device characterization includes frequency and time domain evaluation. The sensor characteristics of bandwidth, range, sensitivity, and resolution are obtained and the trade-offs between these performance characteristics are examined. The sensor performance, which approaches its theoretical limit with a maximum resolution of 2.9 mug is obtained, demonstrating inertial navigation grade performance.

Keywords

Fabry-Perot interferometers; accelerometers; micromachining; microsensors; direct inertial characterization; frequency evaluation; high resolution bulk micromachined accelerometer; inertial navigation grade; interferometric micro-g resolution accelerometer; time domain evaluation; transmission-type intrinsic Fabry-Perot interferometer; Accelerometers; Damping; Fabry-Perot interferometers; Frequency; Mechanical sensors; Optical films; Optical interferometry; Optical sensors; Sensor phenomena and characterization; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2006. 5th IEEE Conference on

Conference_Location

Daegu

ISSN

1930-0395

Print_ISBN

1-4244-0375-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.355882

Filename

4178877