DocumentCode :
2498551
Title :
Investigation of InP single crystal by LST and photoluminescence-Influence of dopants, dislocations and size of crystals
Author :
Jacob, G. ; Overs, K. ; Guillot, R. ; Gall, P. ; Bonnafe, J. ; Haridon, H.L. ; Coquille, R.
Author_Institution :
Crismatec-InPact, Moutiers, France
fYear :
1993
fDate :
19-22 Apr 1993
Firstpage :
634
Lastpage :
635
Abstract :
Laser scanning tomography (LST) has been used to characterize a large number of InP crystals to get an overview of the microprecipitates existing in the crystals. The crystals were doped with usual dopants such as S, Sn, Fe, ND, etc. In the case of sulphur doped crystals, dislocation free as well as dislocated crystals were analyzed. Photoluminescence mapping and dislocation etching were carried out to correlate the different patterns obtained. The density, yield of scattering and distribution of defects depends on the dopant element. In sulphur doped ingots, LST reveals an uniform distribution of numerous and small precipitates. This is true for dislocated as well as for dislocation-free material. Besides these small precipitates, bigger ones are observed only in the dislocated InP samples. In tin doped samples, which are not dislocation free, the distribution looks like S doped samples with dislocations. In iron doped samples, there is a very faint background. Lines and points are revealed. From this first page of the study, it appears that the large precipitates are located on the dislocation, as is the case in GaAs crystals. The density and configuration of defects observed by chemical etching and photoluminescence compared to the configuration of large precipitates obtained by LST enhance the assumption that the large precipitates are lying on the dislocations
Keywords :
III-V semiconductors; dislocation etching; indium compounds; iron; nitrogen compounds; optical tomography; photoluminescence; precipitation; sulphur; tin; InP single crystal; InP:Fe; InP:ND; InP:S; InP:Sn; chemical etching; crystal size; defects; dislocated crystals; dislocation etching; dislocation-free material; dislocations; dopants; large precipitates; laser scanning tomography; microprecipitates; overview; photoluminescence; Crystals; Etching; Gallium arsenide; Indium phosphide; Iron; Neodymium; Photoluminescence; Scattering; Tin; Tomography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on
Conference_Location :
Paris
Print_ISBN :
0-7803-0993-6
Type :
conf
DOI :
10.1109/ICIPRM.1993.380615
Filename :
380615
Link To Document :
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