Self-healing breakdown and electrical conduction of polyimide thin films

Author

Muramoto, Yuji ; Nagao, Masayuki ; Mizuno, Fumiaki ; Kosaki, Masamitsu

Author_Institution

Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan

fYear

1998

fDate

27-30 Sep 1998

Firstpage

173

Lastpage

176

Abstract

We have been studying the breakdown characteristics of polyimide (PI) thin films by taking advantage of self-healing breakdown. The purpose of this study is to clarify the effect of ambient gas (SF₆, N₂, Dry air) and thermal treatment on the self-healing breakdown characteristics of PI thin films in high temperature region. The electric strength (Fb) decreased with temperature and the Dc conduction current (I) increased with temperature. The Fb and I do not depend on ambient gas at high temperature. These results show a thermal breakdown process is considered as a possible breakdown mechanism of PI thin films in high temperature region

Keywords

electric breakdown; electric strength; electrical conductivity; heat treatment; insulating thin films; polymer films; DC conduction current; ambient gas; electric strength; electrical conduction; polyimide thin film; self-healing breakdown; temperature dependence; thermal breakdown; thermal treatment; Breakdown voltage; Electric breakdown; Electrodes; Polyimides; Polymer films; Semiconductor devices; Semiconductor thin films; Temperature dependence; Thin film devices; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Insulating Materials, 1998. Proceedings of 1998 International Symposium on

Conference_Location

Toyohashi

Print_ISBN

4-88686-050-8

Type

conf

DOI

10.1109/ISEIM.1998.741713

Filename

741713