DocumentCode

2498816

Title

Vacuum Processing System for Quartz Crystal Resonators

Author

Frank, J.U.

fYear

1981

fDate

27-29 May 1981

Firstpage

40

Lastpage

47

Keywords

Assembly; Atmosphere; Ceramics; Cleaning; Electrodes; Fixtures; Gold; Neutrons; Resonant frequency; Vacuum systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Thirty Fifth Annual Frequency Control Symposium. 1981

Type

conf

DOI

10.1109/FREQ.1981.200456

Filename

1537396