Title :
CMOS Schottky diodes for photo-detector and thermal-detector applications
Author :
Han, Ji-Hun ; Jeon, Woochul ; Melngailis, John
Abstract :
CMOS fabricated Schotty diodes for photo-detector and temperature sensor applications are reported. In our previous research, Schottky diodes have been designed and fabricated in standard CMOS processes. Since no work has been done on characterizing thermal or optical properties of CMOS Schottky diodes, photo detecting and temperature sensing characteristics are measured. Comparison between CMOS Schottky diodes and pn-j unction photodiodes are presented, because pn-j unction photodiodes have been mainly used as on-chip photo detectors. As a temperature sensor, Schottky diodes showed a linear region between 30degC and 80degC, which is useful for body temperature sensors.
Keywords :
CMOS integrated circuits; Schottky diodes; photodetectors; photodiodes; temperature sensors; CMOS Schottky diodes; on-chip photo detectors; optical properties; photo-detector applications; pn-junction photodiodes; temperature sensor applications; thermal properties; thermal-detector applications; CMOS process; Cutoff frequency; High speed optical techniques; Optical device fabrication; Optical sensors; Photodetectors; Photodiodes; Schottky diodes; Temperature sensors; Thermal sensors;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355917