Title :
Design and analysis of high resonant frequency (1 MHz) MEMS accelerometer
Author :
Singh, Prashant ; Gupta, Puneet ; Srivastava, Prashant ; Goswami, Mausumi ; Singh, B. Raja
Author_Institution :
Dept. of Microelectron., Indian Inst. of Inf. Technol., Allahabad, India
Abstract :
The present paper deals with the design of single axis folded beam electro-statically actuated comb-drive based accelerometer for high resonant frequency range (1 MHz) application. The accelerometer design and analysis is carried out in accordance with standard SOI single mask technology using MEMS Pro v5.1 simulation tool.
Keywords :
accelerometers; capacitive sensors; microsensors; silicon-on-insulator; MEMS Pro v5.1 simulation tool; MEMS accelerometer; SOI single mask technology; electro-statically actuated comb-drive; frequency 1 MHz; high resonant frequency; single axis folded beam; Accelerometers; Capacitance; Micromechanical devices; Resonant frequency; Robot sensing systems; Thumb; Accelerometer; MEMS; capacitive sensing; folded beam; single axis;
Conference_Titel :
Engineering and Systems (SCES), 2013 Students Conference on
Conference_Location :
Allahabad
Print_ISBN :
978-1-4673-5628-2
DOI :
10.1109/SCES.2013.6547581
