Effects of RIE Tuning on the Electrical and Temperature Characteristics of Quartz SAW Resonators

Author

Kotecki, Carl

fYear

1982

fDate

2-4 June 1982

Firstpage

459

Lastpage

469

Keywords

Aluminum; Cleaning; Frequency; Plasma temperature; Sputter etching; Sputtering; Surface acoustic waves; Temperature distribution; Tuning; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

36th Annual Symposium on Frequency Control. 1982

Conference_Location

Philadelphia, Pennsylvania, USA

Type

DOI

10.1109/FREQ.1982.200609

Filename

1537549

Link To Document