Title :
Effects of RIE Tuning on the Electrical and Temperature Characteristics of Quartz SAW Resonators
Keywords :
Aluminum; Cleaning; Frequency; Plasma temperature; Sputter etching; Sputtering; Surface acoustic waves; Temperature distribution; Tuning; Valves;
Conference_Titel :
36th Annual Symposium on Frequency Control. 1982
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1982.200609
