DocumentCode :
2501508
Title :
Effects of RIE Tuning on the Electrical and Temperature Characteristics of Quartz SAW Resonators
Author :
Kotecki, Carl
fYear :
1982
fDate :
2-4 June 1982
Firstpage :
459
Lastpage :
469
Keywords :
Aluminum; Cleaning; Frequency; Plasma temperature; Sputter etching; Sputtering; Surface acoustic waves; Temperature distribution; Tuning; Valves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
36th Annual Symposium on Frequency Control. 1982
Conference_Location :
Philadelphia, Pennsylvania, USA
Type :
conf
DOI :
10.1109/FREQ.1982.200609
Filename :
1537549
Link To Document :
بازگشت