Title :
Frequency Fine Tuning of Reliable SAW Transducers Using Anodization Technique
Author :
Cho, F.Y. ; Chatham, T.B. ; De Leon, R. Ponce
Keywords :
Aluminum; Etching; Frequency; Plasma applications; Plasma chemistry; Protection; Surface acoustic wave devices; Surface acoustic waves; Transducers; Tuning;
Conference_Titel :
36th Annual Symposium on Frequency Control. 1982
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1982.200610