DocumentCode
2501536
Title
Frequency Fine Tuning of Reliable SAW Transducers Using Anodization Technique
Author
Cho, F.Y. ; Chatham, T.B. ; De Leon, R. Ponce
fYear
1982
fDate
2-4 June 1982
Firstpage
470
Lastpage
473
Keywords
Aluminum; Etching; Frequency; Plasma applications; Plasma chemistry; Protection; Surface acoustic wave devices; Surface acoustic waves; Transducers; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
36th Annual Symposium on Frequency Control. 1982
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1982.200610
Filename
1537550
Link To Document