DocumentCode :
2501656
Title :
Allminum Nitride Thin Film and Composite Bulk Wave Resonators
Author :
Lakin, K.M. ; Wang, J.S. ; Landin, A.R.
fYear :
1982
fDate :
2-4 June 1982
Firstpage :
517
Lastpage :
524
Keywords :
Piezoelectric films; Plasma applications; Plasma temperature; Resonance; Semiconductor films; Sputtering; Substrates; Temperature measurement; Transistors; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
36th Annual Symposium on Frequency Control. 1982
Conference_Location :
Philadelphia, Pennsylvania, USA
Type :
conf
DOI :
10.1109/FREQ.1982.200618
Filename :
1537558
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2501656
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