DocumentCode
2501656
Title
Allminum Nitride Thin Film and Composite Bulk Wave Resonators
Author
Lakin, K.M. ; Wang, J.S. ; Landin, A.R.
fYear
1982
fDate
2-4 June 1982
Firstpage
517
Lastpage
524
Keywords
Piezoelectric films; Plasma applications; Plasma temperature; Resonance; Semiconductor films; Sputtering; Substrates; Temperature measurement; Transistors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
36th Annual Symposium on Frequency Control. 1982
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1982.200618
Filename
1537558
Link To Document