Title :
Progress in the Development of Miniature Thin Film Baw Resonator and Filter Technology
Author :
Grudkowski, T.W. ; Black, J.F. ; Drake, G.W. ; Cullen, D.E.
Keywords :
Boron; Chemicals; Etching; Fabrication; Resonator filters; Silicon; Sputtering; Substrates; Transistors; Zinc oxide;
Conference_Titel :
36th Annual Symposium on Frequency Control. 1982
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1982.200621
