Title :
Chemically Polished High Frequency Resonators
Author :
Hanson, William P.
Keywords :
Anisotropic magnetoresistance; Chemical processes; Degradation; Etching; Group technology; Manufacturing; Resonant frequency; Rough surfaces; Surface roughness; Testing;
Conference_Titel :
37th Annual Symposium on Frequency Control. 1983
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1983.200677