Title :
Integrated microphone with CMOS circuits on a single chip
Author :
Kim, E.S. ; Muller, R.S. ; Gray, P.R.
Author_Institution :
Dept. of Electr. Eng., & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
Summary form only given. The first integration of a microphone together with CMOS circuits on a single chip has been demonstrated. It was found that the processes needed to make the microphone can be articulated with a commercial CMOS fabrication line. The microphones, squares 2 mm on a side, were fabricated by combining micromachining procedures (to produce a thin silicon-nitride diaphragm) with ZnO thin-film layers which are used as piezoelectric transducers. The circuits integrated with the microphones consist mainly of several configurations of analog standard cells that were designed and proven for building-block applications. The frequency responses of the integrated microphones are plotted.<>
Keywords :
CMOS integrated circuits; micromechanical devices; microphones; piezoelectric transducers; CMOS circuits; ZnO; analog standard cells; fabrication line; frequency responses; micromachining procedures; microphone; piezoelectric transducers; CMOS process; Fabrication; Frequency; Micromachining; Microphones; Piezoelectric films; Piezoelectric transducers; Semiconductor thin films; Thin film circuits; Zinc oxide;
Conference_Titel :
Electron Devices Meeting, 1989. IEDM '89. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1989.74193