DocumentCode
2502877
Title
An Analysis of Thickness-Extensional Trapped Energy Resonators with Rectangular Electrodes in the Zinc-Oxide Thin Film on Silicon Configuration
Author
Tiersten, H.F. ; Stevens, D.S.
fYear
1983
fDate
1-3 June 1983
Firstpage
325
Lastpage
336
Keywords
Differential equations; Dispersion; Electrodes; Etching; Performance analysis; Piezoelectric films; Resonance; Resonant frequency; Semiconductor thin films; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
37th Annual Symposium on Frequency Control. 1983
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1983.200688
Filename
1537628
Link To Document