Modeling and control of hi-performance motion system

Based upon the analysis of dynamic features of the motion system with the high velocity, high acceleration and high accuracy, a modeling approach of multi-mode vibration coupled motion within wide frequency range is proposed for the hi-performance motion system, which simplifies the motion system by using ldquospring plus damperrdquo for flexible connection and ldquomovable spring plus damper plus rollerrdquo for flexible linear bearing. The main motion and the micro vibrating motions, as well as the coupling of these motions, can be represented and formulated. The simulations and experiments are conducted to demonstrate the validity of the approach. The results show that the model can represent and explain the dynamic characteristics of the motion system within the wide frequency range up to 1000 Hz congruously. The motion control experiments illustrated the expected performance can be achieved.