Title :
High-Frequency Shallow Bulk Acoustic Wave Quartz Frequency Sources
Author :
Rousseau, K.V. ; Yen, K.H. ; Lau, K.F. ; Kong, A.M.
Keywords :
Acoustic waves; Delay lines; Fabrication; Fingers; Frequency; Insertion loss; Lithography; Phase noise; Stability; Temperature;
Conference_Titel :
37th Annual Symposium on Frequency Control. 1983
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1983.200703