• DocumentCode
    2503898
  • Title

    Author index

  • fYear
    1997
  • fDate
    14-14 May 1997
  • Firstpage
    259
  • Lastpage
    259
  • Abstract
    The author index contains an entry for each author and coauthor included in the proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Process-Induced Damage, 1997., 2nd International Symposium on
  • Print_ISBN
    0-9651-5771-7
  • Type

    conf

  • DOI
    10.1109/PPID.1997.596766
  • Filename
    596766