Electrical impedance microchip using microelectrodes

Taking advantage of MEMS (micro electromechanical system) techniques, a microfabricated electrical impedance (EI) chip with microelectrodes was designed and fabricated. The microchip with Ti/Pt/Au detection microelectrodes and Su-8 sample reservoir was realized form glass substrate. The completed micro-electric impedance devices were characterized with NaCl solutions, cell culture solution RPMI1640 and K562 leucocythemica lymphocyte solution over the frequency range of 1 K Hz to 51 KHz. Impedance spectra from 10 Hz to 50 KHz measured in hela cells and transfected hela cells were distinct and demonstrated the ability to be beneficial in evaluating the cell transfection process, which gives an potential application field of electrical impedance microchip.