Ferroelectric thick films on LTCC substrates - preliminary results

Author

Hrovat, Marko ; Holc, Janez ; Drnovsek, Silvo ; Belavic, Darko ; Bernard, J. ; Kosec, Marija ; Golonka, Leszek ; Dziedzic, Andrzej ; Kita, Jaroslaw

Author_Institution

Jozef Stefan Inst., Ljubljana, Slovenia

fYear

2003

fDate

8-11 May 2003

Firstpage

179

Lastpage

183

Abstract

PZT (PbZr_0.53Ti_0.47O₃ with 6% of PbO and 2% of Pb₅Ge₃O₁₁) thick films with a low sintering temperature were printed and fired on either pre-fired or green LTCC foils (LTCC 951, Du Pont). The electrical characteristics of these PZT thick films, together with a set prepared on alumina substrates, were compared. The electrical characteristics of the samples fired at 800°C deteriorated significantly due to interactions between the LTCC substrate and the PZT layer. It is presumed that the SiO₂ that diffused from the LTCC into the PZT layers formed low-permitivity lead-based silicates, which are detrimental to the dielectric properties of the PZT.

Keywords

ferroelectric ceramics; lead compounds; permittivity; silicon compounds; sintering; thick films; titanium compounds; zirconium compounds; 800 C; LTCC substrate; PZT; PZT layer; PZT thick films; Pb₅Ge₃O₁₁; PbO; PbZrO3TiO3; SiO₂; alumina substrates; dielectric property; ferroelectric thick films; green LTCC foils; lead-based silicates; pre-fired LTCC foils; sintering temperature; Ceramics; Composite materials; Conducting materials; Dielectric substrates; Ferroelectric materials; Glass; Nonhomogeneous media; Sensor phenomena and characterization; Temperature; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on

Print_ISBN

0-7803-8002-9

Type

conf

DOI

10.1109/ISSE.2003.1260511

Filename

1260511