Title :
Ferroelectric thick films on LTCC substrates - preliminary results
Author :
Hrovat, Marko ; Holc, Janez ; Drnovsek, Silvo ; Belavic, Darko ; Bernard, J. ; Kosec, Marija ; Golonka, Leszek ; Dziedzic, Andrzej ; Kita, Jaroslaw
Author_Institution :
Jozef Stefan Inst., Ljubljana, Slovenia
Abstract :
PZT (PbZr0.53Ti0.47O3 with 6% of PbO and 2% of Pb5Ge3O11) thick films with a low sintering temperature were printed and fired on either pre-fired or green LTCC foils (LTCC 951, Du Pont). The electrical characteristics of these PZT thick films, together with a set prepared on alumina substrates, were compared. The electrical characteristics of the samples fired at 800°C deteriorated significantly due to interactions between the LTCC substrate and the PZT layer. It is presumed that the SiO2 that diffused from the LTCC into the PZT layers formed low-permitivity lead-based silicates, which are detrimental to the dielectric properties of the PZT.
Keywords :
ferroelectric ceramics; lead compounds; permittivity; silicon compounds; sintering; thick films; titanium compounds; zirconium compounds; 800 C; LTCC substrate; PZT; PZT layer; PZT thick films; Pb5Ge3O11; PbO; PbZrO3TiO3; SiO2; alumina substrates; dielectric property; ferroelectric thick films; green LTCC foils; lead-based silicates; pre-fired LTCC foils; sintering temperature; Ceramics; Composite materials; Conducting materials; Dielectric substrates; Ferroelectric materials; Glass; Nonhomogeneous media; Sensor phenomena and characterization; Temperature; Thick films;
Conference_Titel :
Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
Print_ISBN :
0-7803-8002-9
DOI :
10.1109/ISSE.2003.1260511
