LTCC liquid conductivity detector

Author

Wasilek, Piotr ; Golonka, Leszek J. ; Gorecka-drzazga, Anna ; Roguszczak, Henryk ; Zawada, Tomasz

Author_Institution

Fac. of Microsystem Electron. & Photonics, Wroclaw Univ. of Technol., Poland

fYear

2003

fDate

8-11 May 2003

Firstpage

202

Lastpage

206

Abstract

The design, technology and basic characteristics of the LTCC conductivity detector are presented. The finite element analysis (Ansys program) was applied to calculate the influence of the detector and electrodes geometry on the electrical properties. The electric potential and current density distributions inside the detector channel were analysed. The detector design was carried out on the base of ANSYS simulation. The detector was fabricated in typical LTCC process. YAG laser system was used for electrode fine line patterning and shaping the channels. The detector was tested by measurements of KCl solution with various concentration.

Keywords

ceramics; current density; current distribution; electric potential; electrical conductivity measurement; electrochemical sensors; electrodes; finite element analysis; ANSYS simulation; Ansys program; KCl; LTCC conductivity detector; LTCC process; YAG laser system; concentration measurements; current density distributions; detector channel; detector design; electric potential; electrical properties; electrode fine line patterning; electrode fine line shaping; electrodes geometry; finite element analysis; liquid conductivity detector; Conductivity; Current density; Electrodes; Finite element methods; Gas detectors; Geometrical optics; Joining processes; Optoelectronic and photonic sensors; Sensor phenomena and characterization; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on

Print_ISBN

0-7803-8002-9

Type

conf

DOI

10.1109/ISSE.2003.1260516

Filename

1260516