DocumentCode :
2505256
Title :
Laser processing of solder resist layers on laminated substrates
Author :
Berényi, Richárd
Author_Institution :
Dept. of Electron. Technol., Budapest Univ. of Technol. & Econ., Hungary
fYear :
2003
fDate :
8-11 May 2003
Firstpage :
313
Lastpage :
316
Abstract :
The microelectronics industry is moving toward smaller feature sizes. The main driving forces are to improve performance and to lower cost. From the point of view of performance, the small distances between chips together with the short interconnection routes have of great importance in order to achieve faster operation. The application of polymers for the insulating and protective layers of interconnect substrates is beneficial to the performance and to the cost of a circuit module as well. In the article, the application of advanced laser technology for pattern and via generation has become an efficient tool for the fabrication of very high density interconnects substrates.
Keywords :
integrated circuit interconnections; laser materials processing; polymers; protective coatings; resists; substrates; advanced laser technology; insulating layers; interconnect substrates; laminated substrates; laser processing; microelectronics industry; pattern generation; polymers; protective layers; solder resist layers; via generation; Copper; Integrated circuit interconnections; Laser ablation; Laser beam cutting; Laser beams; Optical materials; Optical microscopy; Power lasers; Resists; Surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
Print_ISBN :
0-7803-8002-9
Type :
conf
DOI :
10.1109/ISSE.2003.1260540
Filename :
1260540
Link To Document :
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