Optical properties of PLZT thin films determined using reflection spectra

Author

Pencheva, Tamara

Author_Institution

Dept. of Phys., Rousse Univ., Bulgaria

fYear

2003

fDate

8-11 May 2003

Firstpage

371

Lastpage

374

Abstract

Optical properties of thin PLZT films of various stoichiometry are determined using reflectance spectra processing. The knowledge of optical properties of PLZT thin films is quite necessary for opto-electronic applications. Materials like PLZT are attractive for the application in integrated optics and for realization of various microelectronic and opto-electronic devices. Their optical properties are strongly dependent on deposition conditions and defects concentration. Thin PLZT films are prepared by pulsed laser deposition on sapphire substrates at different oxygen pressure. Film structure is investigated by WDX. Changes of film refractive index n(λ), extinction k(λ) with wavelength in the spectral region 0.3 1.1 μm and film thickness d are determined as a result of films reflectance spectra modeling and fitting procedure using all points of the spectra.

Keywords

ferroelectric thin films; integrated optics; lanthanum compounds; lead compounds; optical properties; optoelectronic devices; pulsed laser deposition; titanium compounds; zirconium compounds; 0.3 to 1.1 micron; PLZT; PbLaZrO3TiO3; WDX; defects concentration; deposition conditions; film structure; film thickness; integrated optics; microelectronic devices; optical properties; optoelectronic devices; pulsed laser deposition; reflectance spectra processing; reflection spectra; refractive index; stoichiometry; thin films; Integrated optics; Microelectronics; Optical films; Optical materials; Optical reflection; Optical refraction; Optical variables control; Optoelectronic devices; Pulsed laser deposition; Reflectivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on

Print_ISBN

0-7803-8002-9

Type

conf

DOI

10.1109/ISSE.2003.1260554

Filename

1260554