Title :
Silicon micromachining and microfabrication techniques for integrated sensor and actuator systems
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI
Abstract :
Solid-state microsensors and microactuators have recently become attractive for a number of instrumentation and control systems. This paper reviews some of the major and widely used silicon micromachining and microfabrication technologies, including bulk micromachining, surface micromachining, and electroplating techniques along with their applications
Keywords :
electroplating; elemental semiconductors; microactuators; micromachining; microsensors; semiconductor technology; silicon; Si; bulk micromachining; control systems; electroplating techniques; instrumentation; integrated actuator systems; integrated sensor systems; microactuators; microfabrication techniques; microsensors; silicon micromachining; surface micromachining; Actuators; Anisotropic magnetoresistance; Dielectric substrates; Etching; Fabrication; Integrated circuit technology; Micromachining; Sensor arrays; Sensor systems; Silicon;
Conference_Titel :
Electrotechnical Conference, 1994. Proceedings., 7th Mediterranean
Conference_Location :
Antalya
Print_ISBN :
0-7803-1772-6
DOI :
10.1109/MELCON.1994.381038
