DocumentCode
2505681
Title
Silicon micromachining and microfabrication techniques for integrated sensor and actuator systems
Author
Akin, Tayfun
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI
fYear
1994
fDate
12-14 Apr 1994
Firstpage
529
Abstract
Solid-state microsensors and microactuators have recently become attractive for a number of instrumentation and control systems. This paper reviews some of the major and widely used silicon micromachining and microfabrication technologies, including bulk micromachining, surface micromachining, and electroplating techniques along with their applications
Keywords
electroplating; elemental semiconductors; microactuators; micromachining; microsensors; semiconductor technology; silicon; Si; bulk micromachining; control systems; electroplating techniques; instrumentation; integrated actuator systems; integrated sensor systems; microactuators; microfabrication techniques; microsensors; silicon micromachining; surface micromachining; Actuators; Anisotropic magnetoresistance; Dielectric substrates; Etching; Fabrication; Integrated circuit technology; Micromachining; Sensor arrays; Sensor systems; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrotechnical Conference, 1994. Proceedings., 7th Mediterranean
Conference_Location
Antalya
Print_ISBN
0-7803-1772-6
Type
conf
DOI
10.1109/MELCON.1994.381038
Filename
381038
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