DocumentCode
2505765
Title
Absolute pressure sensors in CERMET thick film technology
Author
Janovsky, Libor ; Bauer, Reinhard ; Ensminger, Dirk ; Bojarsky, Aldo
Author_Institution
Dresden Univ. of Appl. Sci., Germany
fYear
2003
fDate
8-11 May 2003
Firstpage
448
Lastpage
451
Abstract
Different requirements of the application of pressure sensors need also different technologies and designs of realisation. The main topic of the paper shows the development of relative and absolute pressure sensor for automotives. The design and technology is focused on thick film technology with Al2O3 ceramics. The realised prototypes especially of absolute pressure sensors were investigated in function and some aspects of quality and of reliability. The results have shown a good suitability for the application goals. This paper is a co-operation between the AB Elektronik Sachsen GmbH and the University of Applied Sciences HTW Dresden with Libor Janovsky ´s work as a guest student from the CVUT Prague at the HTW Dresden.
Keywords
aluminium compounds; automobiles; ceramics; cermets; pressure sensors; thick films; Al2O3; CERMET; automotives; ceramic sensor technology; pressure sensors; thick film technology; Automotive engineering; Biomembranes; Ceramics; Nonhomogeneous media; Pressure measurement; Silicon; Substrates; Temperature sensors; Thick film sensors; Thick films;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
Print_ISBN
0-7803-8002-9
Type
conf
DOI
10.1109/ISSE.2003.1260570
Filename
1260570
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