• DocumentCode
    2505765
  • Title

    Absolute pressure sensors in CERMET thick film technology

  • Author

    Janovsky, Libor ; Bauer, Reinhard ; Ensminger, Dirk ; Bojarsky, Aldo

  • Author_Institution
    Dresden Univ. of Appl. Sci., Germany
  • fYear
    2003
  • fDate
    8-11 May 2003
  • Firstpage
    448
  • Lastpage
    451
  • Abstract
    Different requirements of the application of pressure sensors need also different technologies and designs of realisation. The main topic of the paper shows the development of relative and absolute pressure sensor for automotives. The design and technology is focused on thick film technology with Al2O3 ceramics. The realised prototypes especially of absolute pressure sensors were investigated in function and some aspects of quality and of reliability. The results have shown a good suitability for the application goals. This paper is a co-operation between the AB Elektronik Sachsen GmbH and the University of Applied Sciences HTW Dresden with Libor Janovsky ´s work as a guest student from the CVUT Prague at the HTW Dresden.
  • Keywords
    aluminium compounds; automobiles; ceramics; cermets; pressure sensors; thick films; Al2O3; CERMET; automotives; ceramic sensor technology; pressure sensors; thick film technology; Automotive engineering; Biomembranes; Ceramics; Nonhomogeneous media; Pressure measurement; Silicon; Substrates; Temperature sensors; Thick film sensors; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
  • Print_ISBN
    0-7803-8002-9
  • Type

    conf

  • DOI
    10.1109/ISSE.2003.1260570
  • Filename
    1260570