Title :
Etching Study of AT-Cut Cultured Quartz Using Etchants Containing Fluoride Salts, Hydrofluoric Acid, and Ammonium Bifluorlde
Author :
Bernot, Anthony J.
Keywords :
Abrasives; Additives; Chemicals; Chemistry; Etching; Lapping; Rough surfaces; Scanning electron microscopy; Surface roughness; Surface topography;
Conference_Titel :
39th Annual Symposium on Frequency Control. 1985
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1985.200856
