DocumentCode :
2506490
Title :
An Air-Gap Type Piezoelectric Composite Thin Film Resonator
Author :
Satoh, Hiroaki ; Ebata, Yasuo ; Suzuki, Hitoshi ; Narahara, Choji
fYear :
1985
fDate :
29-31 May 1985
Firstpage :
361
Lastpage :
366
Keywords :
Air gaps; Conductive films; Fabrication; Piezoelectric films; Resonance; Resonant frequency; Semiconductor films; Semiconductor thin films; Substrates; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
39th Annual Symposium on Frequency Control. 1985
Conference_Location :
Philadelphia, Pennsylvania, USA
Type :
conf
DOI :
10.1109/FREQ.1985.200870
Filename :
1537810
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2506490
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