DocumentCode
2506490
Title
An Air-Gap Type Piezoelectric Composite Thin Film Resonator
Author
Satoh, Hiroaki ; Ebata, Yasuo ; Suzuki, Hitoshi ; Narahara, Choji
fYear
1985
fDate
29-31 May 1985
Firstpage
361
Lastpage
366
Keywords
Air gaps; Conductive films; Fabrication; Piezoelectric films; Resonance; Resonant frequency; Semiconductor films; Semiconductor thin films; Substrates; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
39th Annual Symposium on Frequency Control. 1985
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1985.200870
Filename
1537810
Link To Document