DocumentCode
2507258
Title
Curvature control of silicon microlens for THz dielectric antenna
Author
Lee, Choonsup ; Chattopadhyay, Goutam ; Cooper, Ken ; Mehdi, Imran
Author_Institution
NASA Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
fYear
2012
fDate
23-28 Sept. 2012
Firstpage
1
Lastpage
2
Abstract
We have controlled the curvature of silicon microlens by changing the amount of photoresist in order to microfabricate hemispherical silicon microlens which can improve the directivity and reduce substrate mode losses.
Keywords
curvature measurement; dielectric-loaded antennas; elemental semiconductors; microfabrication; microlenses; optical fabrication; optical losses; optical materials; photoresists; silicon; terahertz waves; Si; THz dielectric antenna; curvature control; hemispherical silicon microlens; optical microfabrication; photoresist; reduce substrate mode losses; Antenna arrays; Arrays; Etching; Lenses; Microoptics; Resists; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location
Wollongong, NSW
ISSN
2162-2027
Print_ISBN
978-1-4673-1598-2
Electronic_ISBN
2162-2027
Type
conf
DOI
10.1109/IRMMW-THz.2012.6380111
Filename
6380111
Link To Document