DocumentCode :
2507583
Title :
A low cost solution for the fabrication of dielectrophoretic microfluidic devices and embedded electrodes
Author :
Sano, Michael B. ; Caldwell, John L. ; Davalos, Rafael V.
Author_Institution :
Sch. of Biomed. Eng. & Sci., Virginia Tech - Wake Forest Univ., Blacksburg, VA, USA
fYear :
2011
fDate :
Aug. 30 2011-Sept. 3 2011
Firstpage :
8384
Lastpage :
8387
Abstract :
The versatility of a simple method for producing microfluidic devices with embedded electrodes is demonstrated through the fabrication and operation of two dielectrophoretic devices; one employing interdigitated electrode structures on glass and the other employing contactless electrode reservoirs. Device manufacture is based on the precipitation of silver and subsequent photolithography of thin film resists conducted outside of a cleanroom environment. In current experiments, minimum channel widths of 50 microns and electrode widths of 25 microns are achieved when the distance between features is 40 microns or greater. These results illustrate this technique´s potential to produce microfluidic devices with embedded electrodes for lab on chip applications while significantly reducing fabrication expense.
Keywords :
biomedical electrodes; electrophoresis; microfluidics; photoresists; contactless electrode reservoirs; dielectrophoretic microfluidic devices fabrication; embedded electrodes; glass; interdigitated electrode structures; low cost solution; photolithography; thin film resists; versatility; Dielectrophoresis; Electrodes; Fabrication; Glass; Microfluidics; Resists; Silver; Dimethylpolysiloxanes; Electric Power Supplies; Electrodes; Electrophoresis, Microchip; Ultraviolet Rays;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Engineering in Medicine and Biology Society, EMBC, 2011 Annual International Conference of the IEEE
Conference_Location :
Boston, MA
ISSN :
1557-170X
Print_ISBN :
978-1-4244-4121-1
Electronic_ISBN :
1557-170X
Type :
conf
DOI :
10.1109/IEMBS.2011.6092068
Filename :
6092068
Link To Document :
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