• DocumentCode
    2507583
  • Title

    A low cost solution for the fabrication of dielectrophoretic microfluidic devices and embedded electrodes

  • Author

    Sano, Michael B. ; Caldwell, John L. ; Davalos, Rafael V.

  • Author_Institution
    Sch. of Biomed. Eng. & Sci., Virginia Tech - Wake Forest Univ., Blacksburg, VA, USA
  • fYear
    2011
  • fDate
    Aug. 30 2011-Sept. 3 2011
  • Firstpage
    8384
  • Lastpage
    8387
  • Abstract
    The versatility of a simple method for producing microfluidic devices with embedded electrodes is demonstrated through the fabrication and operation of two dielectrophoretic devices; one employing interdigitated electrode structures on glass and the other employing contactless electrode reservoirs. Device manufacture is based on the precipitation of silver and subsequent photolithography of thin film resists conducted outside of a cleanroom environment. In current experiments, minimum channel widths of 50 microns and electrode widths of 25 microns are achieved when the distance between features is 40 microns or greater. These results illustrate this technique´s potential to produce microfluidic devices with embedded electrodes for lab on chip applications while significantly reducing fabrication expense.
  • Keywords
    biomedical electrodes; electrophoresis; microfluidics; photoresists; contactless electrode reservoirs; dielectrophoretic microfluidic devices fabrication; embedded electrodes; glass; interdigitated electrode structures; low cost solution; photolithography; thin film resists; versatility; Dielectrophoresis; Electrodes; Fabrication; Glass; Microfluidics; Resists; Silver; Dimethylpolysiloxanes; Electric Power Supplies; Electrodes; Electrophoresis, Microchip; Ultraviolet Rays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Engineering in Medicine and Biology Society, EMBC, 2011 Annual International Conference of the IEEE
  • Conference_Location
    Boston, MA
  • ISSN
    1557-170X
  • Print_ISBN
    978-1-4244-4121-1
  • Electronic_ISBN
    1557-170X
  • Type

    conf

  • DOI
    10.1109/IEMBS.2011.6092068
  • Filename
    6092068