Title :
Preparation of carbon microcoils/nanocoils and ceramic microcoils, and their properties
Author :
Motojima, OS ; Iwanaga, H. ; Hashishin, T. ; Kojima, T. ; Tsuda, T.
Author_Institution :
Gifu Univ., Japan
Abstract :
In the review, we introduce the new measurement procedures of the microcoils made of silicon nitride and carbon obtained by the catalytic CVD process, and then describe the mechanical and electrical properties of the microcoils.
Keywords :
carbon; ceramics; chemical vapour deposition; coils; elastic moduli measurement; electrical resistivity; elongation; friction; nanowires; reviews; shear modulus; shear strength; silicon compounds; stress-strain relations; tensile testing; C; C microcoils/nanocoils; Si3N4; Si3N4 microcoils; catalytic chemical vapour deposition process; ceramic microcoils; electrical properties; measurement procedures; mechanical properties; preparation; review; Ceramics; Coils; Glass; Length measurement; Mechanical factors; Mechanical variables measurement; Optical microscopy; Silicon; Springs; Steel;
Conference_Titel :
Micromechatronics and Human Science, 2002. MHS 2002. Proceedings of 2002 International Symposium on
Print_ISBN :
0-7803-7611-0
DOI :
10.1109/MHS.2002.1058002
