مرکز منطقه ای اطلاع رساني علوم و فناوري - Annealing Effects of CoCrTa Film on Single Crystal Silicon Substrate

DocumentCode :

2507878

Title :

Annealing Effects of CoCrTa Film on Single Crystal Silicon Substrate

Author :

Kaneko, Hironori ; Ohashi, Kazumi ; Tawara, Y.

Author_Institution :

Shin-Etsu Chemical Co. Ltd.

fYear :

1998

fDate :

6-9 Jan. 1998

Firstpage :

233

Lastpage :

233

Keywords :

Annealing; Magnetic films; Magnetic noise; Semiconductor films; Silicon; Substrates;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

MMM-Intermag Conference, 1998. Abstracts., The 7th Joint

Conference_Location :

San Francisco, CA, USA

Print_ISBN :

0-7803-5118-5

Type :

conf

DOI :

10.1109/INTMAG.1998.742260

Filename :

742260

Link To Document :