DocumentCode

2507878

Title

Annealing Effects of CoCrTa Film on Single Crystal Silicon Substrate

Author

Kaneko, Hironori ; Ohashi, Kazumi ; Tawara, Y.

Author_Institution

Shin-Etsu Chemical Co. Ltd.

fYear

1998

fDate

6-9 Jan. 1998

Firstpage

233

Lastpage

233

Keywords

Annealing; Magnetic films; Magnetic noise; Semiconductor films; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

MMM-Intermag Conference, 1998. Abstracts., The 7th Joint

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-5118-5

Type

conf

DOI

10.1109/INTMAG.1998.742260

Filename

742260