Fabrication of TiNi shape memory alloy micro-structures and ceramic micro-mold by LIGA-MA-SPS process

Author

Miyano, Naoki ; Iwasa, Hiroshi ; Matsumoto, Michito ; Kato, Fumiki ; Ameyama, Kei ; Sugiyama, Susumu

Author_Institution

Dept. of Sci. & Eng., Ritsumeikan Univ., Kyoto, Japan

fYear

2002

fDate

2002

Firstpage

53

Lastpage

59

Abstract

Metals and ceramics are becoming increasing of importance to microsystem in reproduction and molding techniques because of the mechanical and physical properties. In the study, we have developed a new process using LIGA mold which is able to cast a microstructure of alloys or ceramics using spark plasma sintering (SPS) machine. In addition, the alloys are made by mechanical alloying (MA) method using a combination of different metal powder. A micro spring structure of Ti-Ni-Cu shape memory alloy powder was produced by way of trial. Finally, it was found that the LIGA-MA-SPS process is an effective technique.

Keywords

LIGA; copper alloys; crystal microstructure; mechanical alloying; micromechanical devices; nickel alloys; plasma materials processing; powder metallurgy; shape memory effects; sintering; titanium alloys; LIGA-MA-SPS process; Ti-Ni-Cu; Ti-Ni-Cu shape memory alloy powder; TiNi shape memory alloy micro-structures; ceramic micro-mold; deep-X ray lithography; electroforming; fabrication; mechanical alloying method; mechanical properties; metal powder; micro spring structure; microstructure; molding techniques; physical properties; reproduction; spark plasma sintering machine; Alloying; Ceramics; Fabrication; Mechanical factors; Microstructure; Plasma properties; Powders; Shape memory alloys; Sparks; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 2002. MHS 2002. Proceedings of 2002 International Symposium on

Print_ISBN

0-7803-7611-0

Type

conf

DOI

10.1109/MHS.2002.1058011

Filename

1058011